Substrate transport apparatus

ABSTRACT

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application claims the benefit of U.S. Provisional PatentApplication No. 60/916,724, filed on May 8, 2007, and is related to U.S.Provisional Patent Application No. 60/916,781, filed on May 8, 2007, thedisclosures of which are incorporated by reference herein in theirentirety.

BACKGROUND

1. Field

The exemplary embodiments relate to a substrate transport apparatus and,more particularly, to a robot transport arm of a substrate transportapparatus.

2. Brief Description of Related Developments

Various types of substrate transport apparatus are known in the art.Examples of substrate transport apparatus are described in U.S. Pat.Nos. 5,404,894, 5,431,529 and 5,765,983. U.S. Pat. No. 4,951,601discloses a substrate processing apparatus with multiple processingchambers and a substrate transport apparatus.

In many substrate processing applications, a substrate transportapparatus includes a substrate transport robot which is mounted in acentral transfer chamber. Typically, the transport robot has acontroller that controls a drive that powers an arm assembly. The armassembly typically operates in the transfer chamber to transfer asubstrate to and from various processing chambers on a substrate supportor an end effector.

Generally, the transport and processing chambers are maintainedsubstantially at a vacuum to prevent contamination of substrates whilebeing transported and processed. Other atmospheres may also bemaintained in the transport and processing chambers if required. Someprocessing techniques may require the use of atmospheres that arecorrosive, have an elevated temperature, or that generally present ahostile environment to the transport robot electronics and drive. Inthese cases, it would be advantageous to locate the controller and driveoutside the hostile environment of the transfer chamber. It would alsobe advantageous to simplify the mechanical coupling between the driveand the end effector. It would be still further advantageous to couplethe drive to the end effector in a manner that does not require amechanical connection through the wall of the transfer chamber.

SUMMARY

In accordance with one exemplary embodiment a substrate transportapparatus is provided. The substrate transport apparatus includes afirst shaftless rotary motor including a first stator and a first rotor,the first stator being linearly distributed and the first rotor beingcoupled to a first arm, a second shaftless rotary motor including asecond stator and a second rotor, the second stator being linearlydistributed and the second rotor being coupled to a second arm, thesecond arm being connected to the first arm, and a first substratesupport being coupled to at least one of the first and second arms,wherein the first stator and second stator are configured so that thefirst and second arms and the first substrate support are inside thestators and a motor output at a connection between the first and secondshaftless rotary motors and a respective one of the first and secondarms is a resultant force disposed peripheral to the first and secondarms.

In accordance with another exemplary embodiment a substrate transportapparatus is provided. The substrate transport apparatus includes afirst shaftless rotary motor including a first stator and a first rotor,the first stator being linearly distributed and the first rotor beingcoupled to a first arm, a second shaftless rotary motor including asecond stator and a second rotor, the second stator being linearlydistributed and the second rotor being coupled to a second arm, thesecond arm being connected to the first arm, and a first substratesupport being coupled to at least one of the first and second arms,wherein the first stator and second stator are arranged so that thefirst stator and second stator substantially surround the first andsecond arms.

In accordance with yet another exemplary embodiment a substratetransport apparatus is provided. The substrate transport apparatusincludes a housing, a first stator linearly distributed substantiallyalong peripheral walls of the housing, a second stator linearlydistributed substantially along the peripheral walls of the housing, afirst substrate transport arm having a center of rotation located withinthe housing, the first substrate transport arm having an upper armrotatable about the center of rotation and forming a first rotor, aforearm rotatably coupled at a first end to the upper arm at a locationeccentric to the center of rotation, the forearm forming a second rotor,and a first substrate support rotatably coupled to a second opposite endof the forearm, and wherein the first stator and first rotor form afirst motor and the second stator and second rotor form a second motor,and the upper arm, forearm and first substrate support are inside thefirst and second stators and a motor output of the first and secondmotors at a connection point between the first and second motors and arespective one of the upper arm and forearm is a resultant forcedisposed peripheral to the upper arm and forearm.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the exemplary embodimentsare explained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1 shows a schematic top plan view of a substrate processing systemincorporating features an exemplary embodiment;

FIG. 2 shows a side view of a substrate transport apparatus inaccordance with an exemplary embodiment;

FIG. 3A shows a top view of the embodiment shown in FIG. 2;

FIG. 3B shows an example of a coupling between an arm and a rotor inaccordance with an exemplary embodiment;

FIGS. 4A-4E are respectively top views showing the substrate transportapparatus of FIG. 3 with the end effector in different locations betweenan extended and retracted position;

FIGS. 5A-5C are respectively top views showing the end effector of thesubstrate transport apparatus in three other locations;

FIG. 6 shows a further exemplary embodiment of the substrate transportapparatus where stators of the apparatus are positioned inside atransfer chamber;

FIG. 7 shows another exemplary embodiment of the substrate transportapparatus where stators of the apparatus are in vertical alignment withrotors of the device;

FIG. 8 shows still another exemplary embodiment where the stators androtors are vertically offset from the end effector;

FIG. 9 shows yet another exemplary embodiment where the stators areintegrated into a housing of the substrate processing system;

FIG. 10 shows a schematic top plan view of a substrate transportapparatus in accordance with an exemplary embodiment;

FIG. 11A shows a schematic top plan view a substrate transport apparatusin accordance with another exemplary embodiment;

FIG. 11B shows a schematic top plan view a substrate transport apparatusin accordance with of still another exemplary embodiment;

FIG. 12 shows a side view of the substrate transport apparatus of FIGS.11A and 11B;

FIG. 13 shows a partial side view of the substrate transport apparatusof FIG. 10;

FIG. 14 shows a schematic top plan view of a substrate transportapparatus in accordance with yet another exemplary embodiment;

FIG. 15 shows a schematic top plan view of a substrate transportapparatus in accordance with still another exemplary embodiment;

FIG. 16 shows a partial side view of the substrate transport apparatusof FIG. 14;

FIG. 17 shows a schematic top plan view of still another exemplaryembodiment of a substrate transport apparatus;

FIG. 18 shows a schematic top plan view of a transport apparatus inaccordance with yet another exemplary embodiment;

FIG. 19 shows a side view of the substrate transport apparatus of FIG.10;

FIG. 20 illustrates an exemplary configuration of transfer chambers inaccordance with an exemplary embodiment; and

FIG. 21 schematically illustrates a portion of an exemplary transportapparatus in accordance with an exemplary embodiment.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

Referring to FIG. 1, there is shown a schematic top plan view of asubstrate processing system 100 incorporating features of the exemplaryembodiments. Although the embodiments disclosed will be described withreference to the embodiments shown in the drawings, it should beunderstood that the embodiments disclosed can be embodied in manyalternate forms. In addition, any suitable size, shape or type ofelements or materials could be used.

As shown in FIG. 1, substrate processing system 100 includes a substratetransport apparatus 105, and may include multiple processing chambers110, substrate cassette elevators or load locks 115 and a centraltransfer chamber 120. The substrate processing system 100 is shown inthe Figures as a clustered processing system for exemplary purposesonly. Substrate processing system 100 is merely an example of asubstrate processing system and it should be understood that theexemplary embodiments apply equally well to any other suitable type ofsubstrate processing system including, but not limited to, linearprocessing systems. Examples of suitable processing systems in which theexemplary embodiments can be incorporated include but are not limited toU.S. patent application Ser. No. 11/442,511, entitled “Linearlydistributed Semiconductor Workpiece Processing Tool,” filed May 26,2006, the disclosure of which is incorporated by reference herein in itsentirety. Substrate transport apparatus 105 may be located at leastpartially in transfer chamber 120. The apparatus 105 is adapted to movea substrate from, for example, one of the load locks 115 to, forexample, a processing chamber 110 for processing. When processingchamber 110 is finished processing the substrate, substrate transportapparatus 105 may be used to move the substrate to another processingchamber 110, or to return the substrate to one of the load locks 115.

For purposes of the exemplary embodiments, a substrate may be asemiconductor wafer, a flat panel display, a glass panel, or any othersubstrate suitable for processing by substrate processing system 100.

A vacuum may be maintained in transfer chamber 120, however, it shouldbe understood that transfer chamber 120 may contain any other desiredatmosphere for processing substrates. For example, the atmospheres mayinclude, but are not limited to, controlled air and inert gasatmospheres. Substrate processing system 100 may include appropriatesystems and plumbing (not shown) for generating, and maintaining thedesired atmosphere in transfer chamber 120. For example, a vacuum pump(not shown) may be connected to transfer chamber 120 using suitableplumbing to draw a desired vacuum condition in transfer chamber 120. Thevacuum pump may be regulated by a controller using appropriatemonitoring devices (not shown), such as pressure gauges. In alternateembodiments, substrate transport apparatus 105 may be located in achamber open to outside atmosphere or include air pumps to pumpcontrolled air or inert gases into the chamber.

FIG. 2 shows a side view and FIG. 3A shows a top view of one exemplaryembodiment of substrate transport apparatus 105. It is noted that whilethe exemplary embodiments will be described with respect to certaintransfer assemblies, it should be realized that the magnetic drivesystem described herein may be applied or adapted to any suitabletransfer assembly and is not limited to use with the exemplary transferassemblies shown in the Figures.

In this example, substrate transport apparatus 105 has a first windingset, also referred to as a first stator 200 and a second winding set,also referred to as a second stator 205, each electrically connected toa controller 240. The controller 240 may be any suitable controllerincluding any suitable circuitry and/or program instructions for causingthe operations of the substrate transport apparatus as described herein.In one embodiment the controller 240 may be part of a clusteredarchitecture as described in U.S. patent application Ser. No.11/178,615, the disclosure of which is incorporated herein by referencein its entirety. The first and second stators 200, 205 may have at leasttwo primary windings 245 as can be seen in FIG. 3A. The stators 200, 205may be configured to substantially follow any suitable contour of thetransfer chamber housing 285. The contours may include the outsidesurface of the chamber walls, an inside surface of the chamber walls oran interior portion (e.g. inside or integral with) of the chamber walls.In the exemplary embodiments shown in FIG. 2, the stators 200, 205 areconfigured to substantially follow the contour of the side walls 285′.In other exemplary embodiments the stators 200, 205 may be configured tosubstantially follow a contour of the upper and lower walls 285″, 285′″of the housing 285. In alternate embodiments the stators may beconfigured to follow the contour of any suitable structure inside oroutside of the transfer chamber 120. For example, the stators may followthe contour of a stator support that can have any suitable configurationwithin or outside the transfer chamber 120.

It is noted that the stators 200, 205 may be similar to the statorsdescribed in U.S. Pat. Nos. 5,720,590; 5,813,823; and 5,899,658 all ofwhich are incorporated herein by reference in their entirety. Forexample, each of the first and second stators 200, 205 may be affixed tothe drive housing 285 and isolated from the internal atmosphere of thetransfer chamber 120 (i.e. each drive housing has a portion which passesbetween its respective rotor and stator, and sufficient clearance isprovided between the rotor and this part of the drive housing). In oneexample, magnetic fields that may be produced by the stators 200, 205outside of the transfer chamber 120 impart rotary motion to the firstand second rotors 215, 220 inside the transfer chamber 120. In otherexemplary embodiments, as will be described below, the stators may belocated at any suitable location with respect to the transfer chamber120 for imparting rotary motion to the first and second rotors 215, 220.For example, the stators 200, 205 may be located substantially along acontour of a moveable housing 297, which will be described below.

In this example, substrate transport apparatus 105 also has a firstrotor 215 and a second rotor 220. First and second rotors 215, 220 maybe permanent magnet rotors, each having at least two poles. While rotors215, 220 are shown in FIG. 3A as having a ring shape, it should beunderstood that rotors 215, 220 may have any other shape such as a disk,star, spoked wheel, or any shape suitable for use as a rotor.

Controller 240 may be operable to apply power to primary windings 245 infirst and second stators 200, 205. First stator 200 and first rotor 215operate together as a first motor 250, also referred to as a first drivesection. The first stator 200 and the first rotor 215 may form a firstshaftless rotary drive or motor in that there is no shaft applyingtorque to the rotor 215 or to an arm of the transfer assembly as will bedescribed below. As can be seen in FIG. 3A the stator 200 and/or rotor215 may be linearly distributed in for example, an arcuate manner. Inalternate embodiments, the stator 200 and/or rotor 215 may bedistributed in any suitable manner to follow any suitable predeterminedlinear, and/or curved rotor path. Second stator 205 and second rotor 220operate together as a second motor 260, also referred to as a seconddrive section. The second stator 205 and the second rotor 220 may form asecond shaftless rotary drive that is substantially similar to theshaftless rotary drive described above with respect to stator 200 androtor 215. Motors 250, 260 may comprise magnetic bearings, that is, theforces exerted on each rotor 215, 220 by its respective stator 200, 205may serve to support each rotor 215, 220 in position without a need forconventional bearings and/or support shafts. In alternate embodiments,motors 250, 260 may be any other suitable type, such as, for example,brushless DC motors, stepper motors, or conventional motors.

In this exemplary embodiment, first and second motors 250, 260 are shownstacked one over the other, in vertical alignment for exemplary purposesonly. It should be understood that motors 250, 260 may be positionedco-axially with respect to each other, may be offset, side by side, maybe positioned at an angle, or may have any other spatial orientationwith respect to each other.

Regardless of the type of motor configuration, each stator 200, 205produces a magnetic torque on the respective associated rotor 215, 220,which, if applied with enough force, causes the respective rotor 215,220 to rotate. Controller 240 may be capable of applying power tostators 200, 205 such that rotors 215 and 220 rotate axially, eitherindependently or synchronously. Controller 240 may also be capable ofapplying power independently to stator 200 to control the axial positionof rotor 215, and may be capable of applying power independently tostator 205 to control the axial position of rotor 220. The stator 200,205 and rotor 215, 220 combination may be substantially similar to aself-bearing motor in that a suitable air gap AG is maintained betweenthe rotors 215, 220 and the chamber wall and/or stators 200, 205.

In addition, as can be seen in FIG. 3A, first and second stators 200,205 may have a number of permanent magnets 270 dispersed around theircircumferences. In this exemplary embodiment, permanent magnets 270 onfirst and second stators 200, 205 are positioned such that magneticforces between permanent magnets 270 and first and second rotors 215,220 operate to suspend or hold first and second rotors 215, 220 in ageneral vertical position without mechanical support and in the absenceof power. Thus, when power is not being applied to first and secondstators 200, 205 a particular spatial relationship between first stator200 and first rotor 215 may be maintained, as well as a particularspatial relationship between second stator 205 and second rotor 220.

In one exemplary embodiment, as can be seen in FIG. 2 a Z-drive unit 298may be coupled to the transport system such that the rotors 215, 220 andtheir respective stators 200, 205 are movable in the vertical direction.In one embodiment, the rotors may be housed by a moveable chamber orhousing 297 within the transfer chamber housing 285. The movable chamber297 may have an isolated atmosphere (i.e. vacuum, inert gas, controlledair, etc.). In alternate embodiments the moveable chamber 297 may sharean atmosphere with the transfer chamber housing 285. Z-drive unit 298may be coupled to the moveable chamber 297 such that the moveablechamber 297 is moved in the vertical or Z-direction. Any suitable seals296 may be provided between the moveable chamber 297 and the transferchamber housing 285 to prevent gas leakage into or out of the transferchamber 120. The seals 296 may be, for example, any suitable flexibleseals such as a bellows seal to allow for the movement of the moveablechamber 297. In alternate embodiments the seals may be any moveable sealthat may minimize particle generation during movement of the seal.

The Z-drive unit 298 may be isolated from the internal atmosphere of thetransfer chamber 120 and/or the moveable chamber 297. The Z-drive unit298 may be any suitable drive unit, including, but not limited to,pneumatic, hydraulic, magnetic, or mechanical drive units. In oneexemplary embodiment, an uninterrupted power supply may be connected tothe Z-drive drive unit 298 (and/or the stators) such that if there is apower outage the transport 105 or a substrate (e.g. wafer) located onthe transport within the transfer chamber will not be damaged or collidewith any internal components of the transfer chamber or any chambersconnected thereto. In alternate embodiments, any suitable mechanical,magnetic, or electrical safety device can be used to prevent damage tothe transport and/or substrate located on the transport in the event ofa power outage or other system failure. It is noted that any or all ofthe exemplary embodiments described herein may include the Z-drive unit.

Referring again to FIG. 3A, in alternate embodiments, stators 200, 205each may include secondary windings 310 that may be energized bycontroller 240 to vary the vertical position of rotors 215, 220, inrelationship to stators 200, 205, respectively. Secondary windings 310may be positioned and energized to generate additional magnetic forceson rotors 215, 220 such that a vertical electromotive force is exertedon rotors 215, 220. It is noted that the secondary windings may beconfigured to overcome the magnetic forces of the permanent magnetsdescribed above to allow for the vertical movement of the rotors 215,220. As may be realized the power or magnetic field supplied to thesecondary windings may be such that the further the rotors move from thepermanent magnets the less magnetic force is exerted on the secondarywindings. Secondary windings 310 on rotor 215 may be energizedindependently of secondary windings 310 on rotor 220, allowingindependent control of the vertical positions of rotors 215, 220. Inalternate embodiments, secondary windings 310 of each rotor 215, 220 maybe synchronously energized so the rotors 215, 220 are moved verticallyin unison.

Any suitable transfer or transport assembly may be coupled to first andsecond rotors 215, 220 for transporting substrates to and from thetransfer chamber 120. As can be seen in FIGS. 2 and 3A, in the exemplaryembodiment shown, the transfer assembly may include a substrate support,or end effector 210 coupled to a first rotor 215 by a first arm 225 andto a second rotor 220 by a second arm 230. It is noted that thetransport assemblies described herein are merely exemplary in nature andit should be realized that any suitable transport may be adapted to therotor/stator drive configuration described above. First arm 225 is atleast rotatably coupled to first rotor 215 in a manner such that firstarm 225 rotates in a plane parallel to a plane 275 defined by firstrotor 215. In like manner, second arm 230 is at least rotatably coupledto second rotor 220 in a manner such that second arm 230 rotates in aplane parallel to a plane 280 defined by second rotor 220. In thisexemplary embodiment the first and second arms 225, 230 may be coupledto a periphery of first and second rotors 215, 220, respectively. Inalternate embodiments the first and second arms 225, 230 may be coupledto the first and second rotors 215, 220 at any suitable point and in anysuitable manner. As may be realized, the motor output is a leverageforce F, F′ that may be applied about a fulcrum, which in this examplemay be a center point of the rotors 215, 220. As can also be seen inFIG. 3A, the force F, F′ applied by the motors to their respectiverotors 215, 220 is an eccentric force relative to the axis of rotationof a respective one of the rotors 215, 220. The eccentric leverageforces F, F′ are shown in FIG. 3A as opposing forces (e.g. causingrotation of the respective rotors in opposite directions) for exemplarypurposes only and it should be realized that the direction of the forcesmay be reversed or be generated so that the rotors rotate in the samedirection. It is noted that, in this example, opposing forces cause theend effector 210 to extend and retract while forces in the samedirection (causing rotation of the rotors at the same speed in the samedirection) cause the transport to rotate without substantial extensionor retraction of the end effector 210 as will be described in greaterdetail below. As may be realized forces generated in the same directionthat rotate the rotors at different speeds may extend or retract the endeffector 210 while at the same time rotating the transport.

FIG. 3B shows an example of a linking assembly 320 that may be used forcoupling first or second arm 225, 230 to first or second rotor 215, 220,respectively. In this example, a shaft member 325 or other suitableelongated member extends through first rotor 215 and first arm 225 andis held in place with a retaining mechanism 330. The retaining mechanismmay be any suitable retaining mechanism, such as, any suitablemechanical or chemical fasteners (e.g. nuts/bolts, C-clip, cotter pin,etc.). A bushing 335 or other suitable bearing device (which may beintegral to the shaft member 325) separates first arm 225 from firstrotor 215 and allows first arm to rotate with respect to first rotor215. In alternate embodiments, a shaft may be fixed to rotor 215 and arm225 may be mounted onto the shaft with bearings. In alternateembodiments, any other type of coupling may also be used.

FIGS. 4A-4E show one exemplary type of operation of substrate transportdevice 105. In the exemplary transport configuration shown in FIG. 4A anend effector 210, first arm 225, and second arm 230 are shown in anextended position. By rotating rotor 215 and rotor 220 in opposite axialdirections, as shown by arrows 400 and 405, end effector 210 retracts.If rotor 215 and rotor 220 are operated to rotate synchronously inopposite axial directions 400, 405, respectively, end effector 210 mayretract in one direction along a linear path 410. As shown in FIG. 4E,continued operation of rotors 215, 220 in this fashion causes endeffector 210 to move to a fully retracted position. It should beunderstood that by rotating rotors 215, 220 in directions opposite thoseshown by arrows 400 and 405, end effector 210 may then travel in anopposite direction along linear path 410 toward the extended position.

FIGS. 5A-5C show another exemplary type of operation of substratetransport device 105. FIG. 5A shows end effector 210, first arm 225, andsecond arm 230 in a retracted position, where end effector 210 faces ina direction A. By synchronously rotating rotor 215 and rotor 220 in thesame direction, as shown by arrows 500 and 510, respectively, endeffector 210 may be rotated axially to face in any desired direction. Itshould be understood that rotors 215, 220 may be synchronously rotatedin a direction opposite that shown by arrows 500, 510, thus rotating endeffector 210 in the opposite direction. As described above rotating therotors in the directions of arrows 500, 510 at the same speed may causerotation of the transport device 105 with any substantial extension orretraction of the end effector 210.

Controller 240 can apply power to stator 200 and stator 205 such thatthe movements of substrate transport device 105 shown in FIGS. 4A-4E andFIGS. 5A-5C may be combined, enabling end effector 210 to be placed inany axial location within the various components of substrate processingsystem 100 (FIG. 1), including transfer chamber 120, processing modules110, or load locks 115.

Returning now to FIGS. 2 and 3A, first and second rotors 215, 220 may bepermanent magnet rotors, each having at least two poles. First andsecond stators 200, 205 may have at least two primary windings 245. Inthis embodiment, first stator 200 and second stator 205 are positionedoutside transfer chamber 120, while first rotor 215 and second rotor arepositioned inside transfer chamber 120. Thus, first and second stators200, 205 are separated from first and second rotors 215, 220 andisolated from an internal atmosphere of the transfer chamber 120 by ahousing 285 of substrate processing system 100 as described in U.S. Pat.Nos. 5,720,590; 5,813,823; and 5,899,658, previously incorporated hereinby reference.

In this exemplary embodiment, first stator 200 and first rotor 215 areconcentrically positioned with respect to each other, as are secondstator 205 and second rotor 220. End effector 210, first arm 225, andsecond arm 230 are interposed between rotors 215, 220. In alternateembodiments the rotor, stator and the transfer assembly may have anysuitable configuration.

FIG. 6 shows a further exemplary embodiment of a substrate transportdevice 605. In this embodiment, stators 200, 205 are positioned insidetransfer chamber 120. While no mechanical connections are made throughthe walls of transfer chamber 120 in this exemplary embodiment,electrical connections are made through the walls of transfer chamber120 to stators 200, 205. The electrical connections may be physicalconnections (e.g. wired connections) or contactless connections such asthrough, for example, inductance. The transfer chamber 120 and/or thetransfer device 605 in this exemplary embodiment, may be supported inany suitable manner such as by magnets and/or by a Z-drive unit asdescribed above with respect to FIG. 2.

FIG. 7 shows another exemplary embodiment of a substrate transportapparatus 705. In this embodiment, stators 200, 205 are positionedoutside transfer chamber 120, and in vertical alignment with rotors 215,220, which are located within the transfer chamber 120. End effector210, first arm 225, and second arm 230 remain interposed between rotors215, 220. Again, in this exemplary embodiment the transfer chamber 120and/or transfer apparatus 705 and its drive may be suitably supportedand aligned with the processing chambers 110 in any suitable manner,such as by, for example, magnets and/or the Z-drive unit described abovewith respect to FIG. 2.

FIG. 8 shows still another exemplary embodiment of a substrate transportapparatus 805. In this exemplary embodiment, rotors 215, 220 areconcentrically positioned and horizontally aligned with respect to theirrespective stators 200, 205. End effector 210, first arm 225, and secondarm 230 are vertically offset from rotors 215, 220 and stators 200, 205.In this exemplary embodiment the transport apparatus 805 and/or thetransfer chamber 120 may be suitably supported in the Z-direction asdescribed above. In alternate embodiments, the transfer chamber 120and/or transfer apparatus 805 may be suitably vertically supported inany suitable manner.

FIG. 9 shows yet another exemplary embodiment of a substrate transportapparatus 905. Similar to the exemplary embodiment shown in FIG. 2,first stator 200 and first rotor 215 are concentrically positioned withrespect to each other, as are second stator 205 and second rotor 220.End effector 210, first arm 225, and second arm 230 are interposedbetween rotors 215, 220. In this exemplary embodiment, first stator 200and second stator 205 are embedded or otherwise integrated into housing285. As shown, first and second stator 200, 205 are embedded in a wall910 of housing 285. Again it is noted that the transport apparatus 905and/or the transfer chamber 120 may be vertically supported in anysuitable manner. For example, in one embodiment the Z-drive unit 298described above with respect to FIG. 2 may be suitably coupled to thetransfer chamber 120 and/or the transport apparatus 905. In alternateembodiments, the transport apparatus 905 may be vertically supported by,for example, magnetic interaction between the rotors and stators.

By proper design and use of magnetic and non-magnetic materials, it ispossible to mount all moving parts, including motor rotors, inside oftransfer chamber 120, while placing the magnetic coils, such as themotor stators, outside the transfer chamber 120 or embedding themagnetic coils within the chamber housing 285 (e.g. placedwithin/integral to or recessed into walls of the housing). For example,the transfer chamber housing 285 may be made of a non-magnetic materialallowing the magnetic stators to function while mounted to the outsideof, or embedded in the housing 285. Locating the stators outside orwithin the walls of the housing may eliminate known outgassing problemsand electrical feedthroughs that degrade performance of systems havingactive electromagnets in a vacuum environment.

As can be seen in the Figures, for example FIGS. 9 and 12, the housing285 of the transfer chamber 120 may provide a non-magnetic barrierseparating the vacuum region or inside of the chamber from theatmospheric region or outside of the chamber. As such, the transferchamber 120 may have a portion of the housing 285 that passes between,for example, rotor 1106, and stator 1009. As such, sufficient clearanceor an air gap AG, as shown in FIG. 12, may be provided between the rotor1106 and the chamber housing 285. The air gap AG may be maintained inany suitable manner. For example, in the exemplary configuration shownin FIG. 12, the air gap is maintained through the utilization of shaft1201′. In other exemplary embodiments, the drive system of the transferapparatus may be configured as a self bearing drive system where the airgap is maintained by, for example, magnetic forces between the statorsand rotors.

Referring now to FIGS. 10, 13 and 19, another exemplary embodiment of asubstrate transport apparatus 1000 is shown. In this exemplaryembodiment the transport apparatus 1000 comprises stators 1006, 1007(stators 1006, 1007 can be seen best in FIG. 19), a first and secondrotor link 1004, 1005, a first and second arm link 1002, 1003 and asubstrate support or end effector 210D. This exemplary embodiment issimilar to that shown in FIGS. 2 and 3A except for the rotor being inthe form of a link or spoke rather than ring shaped as will be describedbelow. It is noted that while the links 1002-1005 are shown in theFigures as having a substantially straight configuration, in alternateembodiments the links 1002-1005 may have any suitable shape orconfiguration including, but not limited to, curved or other geometricalshapes.

Stators 1006 and 1007 may be substantially similar to stators 200 and205 with the exception of there being no permanent magnets 270 effectingthe magnetic bearing described above. It is again noted that the stators1006, 1007 may be located within the transfer chamber 120 or isolatedfrom an atmosphere of the transfer chamber 120 as described above.Stators 1006 and 1007 may have primary windings that, when energized,exert a magnetic torque on rotor links 1004, 1005 as will be describedbelow. In this exemplary embodiment the stators 1006, 1007 are shown asbeing concentrically stacked above one another (FIG. 19), for examplestator 1006 is located above stator 1007. In alternate embodiments, thestators may have any other suitable configuration.

In this exemplary embodiment, the exemplary first and second rotor links1004, 1005 are pivotable about the center C of the transfer chamber 120.In alternate embodiments the first and second rotor links may bepivotable about any desired location within the transfer chamber. Thefirst and second rotor links 1004, 1005 may be rotatably mounted on ashaft 1201 as can be seen best in FIG. 13. Shaft 1201 may be located atthe center C of the transfer chamber 120. In alternate embodiments thetransport may be configured so the shaft 1201 may be located at anydesired location within the transfer chamber. A bearing support sleeve1302 may be mounted on shaft 1201. The bearing support sleeve 1302 maybe slip fit or press fit over the shaft 1201. In alternate embodiments,any suitable manner of fitting the bearing sleeve to the shaft may beused. In this example, bearing 1301A is fitted over the top of thebearing sleeve 1302 and bearing 1301B is fitted over the bottom of thebearing sleeve 1302. Bearings 1301A, 1301B may be any suitable bearingfor supporting vertical and/or radial loads. The bearings 1301A, 1301Bmay be press fit on bearing support sleeve 1302. In alternateembodiments, any suitable manner of fitting the bearing on the supportsleeve may be used. In other alternate embodiments, the shaft 1201 maybe a spline shaft and the bearing support sleeve may have linear splineguides 1304 that prevent rotation of the bearing support sleeve while atthe same time, allowing vertical movement of the transporter 1000 alongthe spline shaft. In still other alternate embodiments, the bearings maybe mounted or otherwise affixed to the shaft without a bearing supportsleeve.

A proximate end of the first rotor link 1004 may, for example, berotatably mounted on shaft 1201 via bearing 1301A and the proximate endof the second rotor link 1005 may be rotatably mounted on shaft 1201 viabearing 1301B. The proximate ends of the rotor links may be connected tothe bearing in any suitable manner. In alternate embodiments the firstand second rotor links 1004, 1005 may be rotatably mounted on the shaft1201 in any suitable manner. A cover 1303 or cap may be provided overthe shaft/bearing assembly to prevent any particles that may begenerated by the bearings from being released into the transfer chamber120. In alternate embodiments any suitable particle containment devicemay be used such as for example, a vacuum or fan. Distal ends of thefirst and second rotor links 1004, 1005 extend radially from the shaft1201, which in this example coincides with the center C of the transferchamber 120, towards the outer walls of the chamber 120. In alternateembodiments the shaft 1201 may be located away from the center C of thetransfer chamber. Magnets 1001A, 1001B may be mounted on the distal endsof the rotor links 1004, 1005 respectively. Magnets 1001A, 1001B may bepermanent magnets with, for example, two poles. The magnets may have anysuitable shape including, but not limited to, an arc segment or platen,a block and/or a disk. In alternate embodiments any suitable type and/orshape magnets may be used. Rotor link 1004 and magnet 1001A may interactwith the stator 1006 to form a first motor while rotor link 1005 andmagnet 1001B may interact with stator 1007 to form a second motor. Themotors may be three phase motors that are segmented such that sectionsof the motor can be controlled independently to operate differentlinkages on the same motor armature. In alternate embodiments the motorsmay have any suitable number of phases. A controller, such as controller240, may be used to apply power to the windings of stators 1006, 1007 asdescribed above with respect to stators 200, 205 of FIG. 2.

In this exemplary embodiment, a proximate end of a first arm link 1003is rotatably connected to the distal end of the first rotor link 1004and a distal end of the first arm link 1003 is rotatably connected toend effector 210D. A proximate end of a second arm link 1002 isrotatably connected to the distal end of the second rotor link 1005 andthe distal end of arm link 1002 is rotatably connected to end effector210D. Arm links 1002, 1003 may be rotatably connected to the rotor links1004, 1005 by any suitable connection, such as for example, a pinned orbolted connection as shown in FIG. 3B. The arm links 1002, 1003 may beconnected to the end effector in substantially the same manner using,for example, a pinned or bolted connection. The connection between armlinks 1003, 1002 with the end effector 210D may be configured such thata longitudinal axis of end effector 210D remains along an axis ofextension/retraction 1020 as the transport 1000 moves from its extendedand retracted positions.

The operation of the transport apparatus 1000 shown in FIG. 10 issubstantially the same as that described above with respect to FIGS.4A-E and FIGS. 5A-5C. However, instead of the drive having ring shapedrotors, the rotors in this exemplary embodiment take the form of links1004, 1005. For example, each stator 1006, 1007 produces an eccentricmagnetic leverage force on a respective one of the links 1004, 1005 thatis applied about a fulcrum, which in this example may be the centerpoint C at which the shaft 1201′ is located. The eccentric leverageforces F, F′ are shown in FIG. 10 for exemplary purposes only and itshould be realized that the direction of the forces may be reversed. Theleverage force creates a torque on its respective rotor link 1004, 1005,which, if applied with enough force, causes its respective rotor 1004,1005 to rotate. Controller 240 may be capable of applying power tostators 1006, 1007 such that rotor links 1004 and 1005 rotate axially,either independently or synchronously. Controller 240 may also becapable of applying power independently to stator 1006 to control theaxial position of rotor 1004 and may be capable of applying powerindependently to stator 1007 to control the axial position of rotor1005. When the rotors 1004, 1005 are energized to rotate in oppositedirections, for example, when rotor link 1004 rotates clockwise androtor link 1005 rotates counterclockwise, the end effector may travelalong linear path 1020 toward an extended position and vice versa.

In one exemplary configuration, each of the stators 1006, 1007 may alsoinclude secondary windings which may be energized by, for example,controller 240 to vary the vertical position of rotor links 1004, 1005,in relationship to stators 1006, 1007, respectively. In this example,the rotors may be free to move vertically along the shaft 1201.Secondary windings may be positioned and energized to generateadditional magnetic forces on rotor links such that a verticalelectromotive force is exerted on rotors 1006, 1007 causing rotors 1006,1007 to ride along, for example, the linear spline guides 1304 on shaft1201. In alternate embodiments, secondary windings on rotor 1006 may beenergized independently of secondary windings on rotor 1007, allowingindependent control of the vertical positions of rotors 1006, 1007. Inother alternate embodiments the secondary windings may form a selfbearing motor to maintain a sufficient air gap between the rotors andwalls of the housing and to support the rotors as a desired height. Anuninterrupted power supply may be connected to the secondary windings toprevent the rotors/transfer apparatus drive system from colliding withanything during a power outage. In other exemplary configurations, aZ-drive, similar to drive 298 may be coupled to the shaft 1201 toprovide vertical movement of the transfer apparatus.

Although stators 1006, 1007 are shown in the Figures as being integratedinto the housing 285, it should be understood that stators 1006, 1007can have other configurations such as, for example, the configurationsshown in FIGS. 2 and 6-8.

In other exemplary embodiments, where the transport is supported on ashaft as shown, for example, in FIGS. 10, 13 and 19, the rotatablecoupling between the end effector 210D and the arm links 1002, 1003 maybe such that the respective coupling of each arm link interact with oneanother. For example, as can be seen in FIG. 21, another exemplarytransport apparatus 2100 is shown. The transport apparatus may besubstantially similar to the transport apparatus described above withrespect to FIGS. 10, 13 and 19. However, in this exemplary embodimentdistal ends of each of the arm links 2102, 2103 include, for example,teeth 2110 or other suitable meshing features that are configured tomaintain radial or longitudinal alignment of the end effector 210D alonga path of extension/retraction 1020 as the end effector is movedradially in the direction of arrow 2120. The teeth may also serve tolink the movement of arm link 2103 with arm link 2102 so that arm link2102 drives arm link 2103. As can also be seen in FIG. 21, in thisexemplary embodiment only rotor link 1005 has magnets 1001B affixed toits distal end (in alternate embodiments the magnets may be located onrotor link 1004). The meshing engagement between the arm links 2102,2103 may allow the transport to be extended and retracted with only onemotor 1006, 1001B.

Referring now to FIGS. 11A, 11B and 12, dual end effector transportapparatus 1100, 1200 are shown. The dual end effector transportapparatus 1100, 1200 may have, for example, two transports 1000′, 1100′(as in FIG. 11A) or 10001″, 1100″ (as in FIG. 11B). The dual endeffector transport apparatus may have one transport located above theother transport, for example, in FIG. 11A transport 1100, is shown asbeing located above transport 1000′. Transports 1000′, 1100′, 1000″ and1100″ are substantially similar to transport 1000 described above. Assuch, similar features will have similar reference numbers. It is notedthat while the rotors in the exemplary embodiments shown in FIGS. 11A,11B and 12 are described as being supported on shaft 1201′ it should berealized that the rotors may be supported in a self bearing fashion asdescribed above with respect to FIGS. 2-9. It is also noted that theexemplary drive system of FIGS. 11A, 11B and 12 may include a Z-driveunit as described above with respect to FIG. 2 where the Z-drive unitmay be coupled to the transfer chamber and/or the shaft 1201′.

The transfer chamber 120 may have an upper motor ring 1201 and a lowermotor ring 1200 integrated or embedded into its housing 285substantially similar to that shown in FIG. 12. The upper and lowermotor rings 1201, 1200 may each contain two stators, 1008, 1009 and1006, 1007 respectively, for magnetically driving the rotor links 1004′,1005′, 1106, 1107. Although stators 1006-1009 are shown in the FIG. 12as being integrated into the housing 285, in alternate embodiments thestators may be configured in substantially the same manner as that shownin FIGS. 2 and 6-8. Rotor links 1004′, 1005′, 1106, 1107 may be mountedon shaft 1201′ in a manner substantially similar to that described fortransport 1000 and as shown in FIG. 13.

Rotor links 1106, 1107, of the upper transport 1100′ may be driven bythe upper motor ring 2101 where for example, rotor link 1107 is drivenby stator 1008 and rotor link 1106 is driven by stator 1009. Rotor links1004′, 1005′ of the lower transport 1000′ may be driven by the lowermotor ring 1200 where, for example, rotor link 1004′ is driven by stator1006 and rotor link 1005′ is driven by stator 1007. Rotor links 1106,1107 and 1004′, 1005′ may be driven by their respective stators in amanner substantially similar to that described for transport 1000.

Referring now to FIGS. 11A and 12, the operation of the transportapparatus 1100 will now be described. Transport 1000′ and transport1100′ may be extended or retracted individually or in unison by, forexample, a controller such as controller 240. The operation of eachtransport 1000′, 1100′ is substantially similar to the operation oftransport 1000 described above. For example, stator 1008 of the uppermotor ring may be energized exerting an eccentric leverage force toproduce a magnetic torque on rotor link 1107 so that rotor link 1107 isrotated about, for example, the center C of the transfer chamber 120 ina clockwise or counterclockwise direction. Likewise, stator 1009 of theupper motor ring may be energized exerting a magnetic torque on rotorlink 1106 so that rotor link 1106 is rotated in a correspondingclockwise or counterclockwise direction. Rotor links 1106, 1107 havemagnets 1101C, 1001D respectively on their distal ends. As the rotorlinks 1106, 1107 are rotated their distal ends either come together ormove apart causing the proximate ends of arms 1108, 1109 to also cometogether or move apart which in turn causes the end effector 210B toextend or retract along axis 1020′. As can be seen in FIG. 11A endeffectors 210A′, 210B′ may both extend and retract in the samedirection, that is end effectors 210A′, 210B′ both face the sameprocessing chamber 110 or load lock 115 of the processing system 100.This may allow for the fast swap of substrate from or to a load lock, aprocessing chamber or any other desired location.

Similarly, transports 1100′ and 1000″ of transport apparatus 1200 shownin FIG. 11B operate in substantially the same way as transports 1100′,1000″ of transport apparatus 1100 as described above. However, insteadof facing the same direction, transports 1100′, 1000″ may face oppositedirections so that end effectors 210A″, 210B″ are extended and retractedsubstantially about 180 degrees apart from each other. For example,controller 240 may be configured so that the upper and lower motor rings1201, 1200 and their respective stators 1006, 1007, 1008, 1009 areenergized in unison or separately so that each transport 1100′, 1000″may be extended or retracted individually or in unison. In alternateembodiments, each of the transports may be rotated clockwise orcounterclockwise, either individually or in unison, about the center Cor any other desired position of the transfer chamber in a mannersubstantially similar to that described above.

In alternate embodiments, referring to FIG. 11B, each of the transports1100′ and 1000″ may be independently rotatable about shaft 1201′ suchthat the end effectors 210A″ and 210B″ can be extended and retracted inthe same direction, opposite directions or at any suitable angularrelationship to each other. For example, the transports 1100′, 1000″ maybe independently rotated to face the same direction (as shown in FIG.11A) or they may be independently rotated so they extend/retract alongpaths that are at right angles (or any other suitable angle) apart fromeach other.

Referring now to FIGS. 14 and 16, another transport apparatus 1400 inaccordance with an exemplary embodiment will now be described. It isnoted that the transport apparatus 1400 in this example is illustratedas a SCARA type transport for exemplary purposes only to illustrate thatthe transport apparatus drive system described herein can be applied toany suitable transfer arm/device. The SCARA transport may have stators1006′, 1007′, an upper arm 1402, a forearm 1405 and an end effector orsubstrate holder 210C.

Stators 1006′, 1007′ are substantially similar to stators 1006, 1007 asdescribed with respect to transports 1100 and 1200. Also, stators 1006′and 1007′ may be controlled by, for example, controller 240 insubstantially the same manner as described above for stators 1006, 1007.

The upper arm 1402 may be rotatably mounted to the center C of a disk orrotor substantially similar to that described above with respect toFIGS. 2 and 3, at a shoulder joint 1401. In alternate embodiments theupper arm 1402 may be a disk or rotor as described above with respect toFIG. 2 and 3 where, for example, the upper arm is rotatably coupled tothe disk at an eccentric location. In other alternate embodiments theupper arm may have any suitable configuration. The upper arm 1402 andits respective stator may form a self bearing motor. In alternateembodiments the upper arm may be mounted to the center of the transferchamber and supported in any suitable manner. In still other alternateembodiments the SCARA transport may be configured so that the transportmay be placed in any desired location within the transfer chamber. Theforearm 1405 is rotatably mounted on the upper arm 1402 at, for example,an elbow joint 1404. The upper arm 1402 and the forearm 1405 may berotatably joined via a support shaft 1601 mounted to the upper arm 1402.The support shaft 1601 may have any suitable configuration and extendthrough the forearm 1405. The support shaft 1601 may have suitablebearings to support the forearm 1405 while at the same time, allowingrotational movement of the forearm 1405 about the elbow joint 1404. Inalternate embodiments, the upper arm and forearm may be joined in anysuitable manner. End effector 210C is rotatably mounted to forearm 1405at a wrist joint 1406 in a substantially same manner to that describedabove with respect to the forearm and upper arm.

In this exemplary embodiment the stators 1006′, 1007′ may be integratedor embedded into the transfer chamber housing 285, as can be seen inFIG. 16 and as described above, substantially forming a ring around thesubstrate transport 1400. In alternate embodiments the stator may formany suitable shapes relative to the substrate transport 1400. Stators1006′, 1007′ may be concentrically stacked, one above the other, asshown in FIG. 16. In alternate embodiments the stators may have anyother desired configuration such as, for example, the configurationshown in FIGS. 2 and 6-8. In this exemplary embodiment, the upper arm1402 extends radially from the center C of the transfer chamber 120towards the walls or housing 285 of the chamber 120 and towards thestators 10061, 10071. Magnets 1403A may be fixedly mounted on the distalor elbow end of the upper arm 1402 so that upper arm 1402 may act as arotor. Upper arm 1402 and magnets 1403A interact with, for example,stator 1007′ forming a first motor. Magnets 1403B may also be fixedlymounted to the proximate or elbow end of forearm 1405 so that forearm1405 may act as a rotor. Forearm 1405 and magnets 1403B interact with,for example, stator 1006′ forming a second motor. Magnets 1403A, 1403Bmay be substantially similar to those described above with respect totransports 1000, 1100 and 1200.

End effector 210C is rotatably mounted on a distal end of the forearm1405 at a wrist joint 1406. The end effector 210C may be mounted to theforearm 1405 in substantially the same manner that forearm 1405 ismounted to the upper arm 1402 as described above. The end effector 210Cmay be a paddle type end effecter employing vacuum gripping of asubstrate or a forked end effector having active or passive edgegripping. In alternate embodiments, any suitable end effector andsubstrate gripping method may be used. The end effector 210C may beconfigured so that the longitudinal axis of the end effector 210Cremains along the axis of radial extension or retraction 1020′″ as thetransport 1400 moves from an extended position to a retracted positionand vice versa.

In one exemplary embodiment, the arm may have a slaved configurationwhere only the upper arm acts as a rotor. For example, there may be ashoulder pulley, an elbow pulley and a wrist pulley (not shown) locatedwithin the upper arm and forearm. The shoulder, elbow and wrist pulleysmay have their center of rotation respectively located at the shoulder1401, the elbow 1404 and the wrist 1406. The shoulder pulley may be, forexample, fixedly connected to a stationary point in the transfer chamberso that when the upper arm rotates about the shoulder the shoulderpulley remains fixed or stationary. The elbow pulley may consist of twopulleys, one being an idler pulley that is drivingly connected to theshoulder pulley while the other is a drive pulley that is fixedlyconnected to the idler pulley. The elbow drive pulley may be drivinglyconnected to the wrist pulley, which in turn is fixedly connected to theend effector 210C. The pulleys may be configured so that as thetransport 1400 extends or retracts the elbow pulley is driven by theshoulder pulley via the rotation of the upper arm 1402, which in turndrives the wrist pulley in such a way that the longitudinal axis of theend effector remains along the axis of radial extension 1020′″.

Referring still to FIGS. 14 and 16, the operation of the exemplary SCARAtransport 1400 will now be described. The operation of the transportapparatus 1400 shown in FIG. 14 is substantially the same as thatdiscussed above with respect to FIG. 10. However, instead of having tworotor links rotating about the center C of the chamber 120, in thisexample, only the upper arm 1402 rotates about the center C of chamber120 while the forearm 1405 rotates about the elbow 1404. For example,stator 1007′, when energized, produces an eccentric magnetic leverageforce that produces a torque on upper arm 1402, which, if applied withenough force, causes upper arm 1402 to rotate in either a clockwise orcounterclockwise direction about point C. Forearm 1402 is rotated in asimilar fashion about the elbow 1404 by the magnetic torque produced bystator 1006′.

When the upper arm 1402 and forearm 1405 are caused to rotate inopposite directions via the magnetic torque exerted on them by stators1006′, 1007′, for example, when upper arm 1402 rotates clockwise andforearm 1405 rotates counterclockwise, the end effector 210C may travelalong linear path 1020′″ toward an extended position and vice versa.Alternatively, the entire transport 1400 may be rotated about theshoulder 1401 or the center C of chamber 120 in a clockwise orcounterclockwise direction via the controller energizing stator 1007′ sothat only the upper arm 1402 is rotated. Where only the upper arm 1402is rotated, the forearm 1405 and the end effector 210C may remain intheir relative position and may be naturally rotated with the upper arm1402. In alternate embodiments both stators 1006′, 1007′ may beconfigured so that when energized they may effect the rotation oftransport 1400 as a unit about the shoulder 1401.

As described above, stators 1006′, 1007′ may also include secondarywindings which may be energized by controller 240 to vary the verticalposition of the upper arm 1402 and the forearm 1405, and thus thetransport 1400. In alternate embodiments, the vertical position of thetransport may be controlled or varied in any suitable manner such as,for example, by a linear motor. In other alternate embodiments, theshaft 1601 may be configured to allow vertical travel of the forearm1405 along the shaft such that the secondary windings may cause verticalmovement of the forearm relative to the upper arm.

Referring now to FIG. 15, another exemplary SCARA type transport 1400′is shown. This exemplary embodiment is substantially similar to theSCARA type transport 1400 however, magnets are not located on theforearm at the elbow as described above for transport 1400. Rather, themagnets 1403B′ may be located on a distal end of a forearm drive member1501. Forearm drive member 1501 may be rotatably mounted about theshoulder 1401′, which in this example coincides with the center of thechamber 120, in substantially the same manner the upper arm 1402′ ismounted. Upper arm 1402′ may be mounted in substantially the same manneras upper arm 1402 described above. A shoulder pulley 1504 may also bemounted at the shoulder 1401′ and may be fixedly connected to theforearm drive member 1501 so that when, for example, the forearm drivemember 1501 is rotated the shoulder pulley 1504 rotates with it. Anelbow pulley 1505 may be mounted at the elbow joint 1404′ about the axisof rotation of the forearm 1405′. The elbow pulley 1505 may be fixedlymounted to the forearm 1405′ so that when, for example, the elbow pulley1505 rotates the forearm 1405′ rotates with it. The elbow pulley 1505may be drivingly connected to the shoulder pulley 1504 by, for example,a drive belt, band(s) or chain 1410. In alternate embodiments anysuitable drive may be used. Shoulder pulley 1504, elbow pulley 1505 andbelt 1410 may be contained within the upper arm 1402′ and forearm 1405′so that any particles that may be generated are prevented from beingreleased into the chamber 120. In alternate embodiments the shoulderpulley, elbow pulley and belt may be mounted in any suitable location.In other alternate embodiments, the forearm 1405′ and or end effector210C′ may be slaved to the upper arm 1402′ through the pulley system asdescribed above.

The operation of the transport 1400′ as shown in FIG. 15 issubstantially the same as for transport 1400 except that the forearm1405′ is driven by the forearm drive member 1501 rather than magnets1403B mounted on the forearm as described above for transport 1400. Forexample, when forearm drive member 1501 is caused to rotate by theeccentric magnetic leverage force and resulting torque produced bystator 1006′, the shoulder pulley 1504 also rotates. Shoulder pulley1504 in turn causes the elbow pulley 1505 to rotate. Shoulder pulley1504 may be drivingly connected to the elbow pulley 1505 by, forexample, belt 1410. The elbow pulley 1505 in turn causes the forearm1405′ to rotate. When the upper arm 1402′ and the forearm drive member1501 are actuated simultaneously, the end effector 210C′ is caused toextend or retract along axis 1020″″ in a manner substantially similar tothat described above with respect to transport 1400. It is noted thatthe end effector 210C′ may have slaved movement such that as the endeffector is extended it remains longitudinally oriented (e.g. front toback) along the axis of extension/retraction 1020″″.

In other exemplary embodiments, transport apparatus 1400, 1400′ may havea second SCARA type transport 1400″, 1400′″ rotatably mounted at theshoulder or center of the transfer chamber as can be seen in FIGS. 17and 18. It is again noted the SCARA type transports shown in the Figuresare merely an exemplary application of the drive system disclosed hereinand that the drive system in not limited to any particular arm/transportconfiguration. Transports 1400″, 1400′″ may be mounted within thetransfer chamber in a manner substantially similar to that discussed fortransport apparatus 1100 and shown in FIG. 12. Transports 1400″, 1400′″may operate in substantially the same manner as described above fortransports 1400, 1400′. This would allow for a dual SCARA arm transportand fast swapping of substrate. The dual SCARA arms may be independentlyrotatable about the center of the chamber or they may rotate in unisonin a manner substantially similar to that described above with respectto FIG. 11B.

Referring now to FIG. 20, transfer chambers 2001, 2002 including thecoaxial magnetic drive system described herein are shown as beingcoupled to each other as modular units. The transfer chambers may becoupled to each other in any suitable manner such as by a load lock ortunnel 2050. Each of the transfer chambers 2001, 2002 may be isolatedfrom each other such that they each have their own internal atmosphere.In other exemplary embodiments the transfer chambers 2001, 2002 may notbe isolated from each other. It is noted that while the transferchambers described above have a generally circular shape it should berealized that the transfer chamber may have any suitable shapeincluding, but not limited to, the rectangular shape shown in FIG. 20.In this exemplary embodiment the transfer assembly 2010 may be a slavedtransfer system utilizing, for example belts and pulleys such that asthe upper arm 2020 is rotated via respective rotors and stators theforearm 2030 and end effecter 2040 are extended into a processing modulePM, another transfer chamber or any other suitable area. While thetransfer assembly 2010 is shown as a SCARA type assembly it is notedthat any suitable transfer assembly may be utilized such as, forexample, the assemblies described above with respect to FIGS. 1-19. Therotors and stators of the transfer assembly 2010 may be suitablypositioned within the transfer chambers 2001, 2002 such that arespective rotor (e.g. links 2020, 2030, 2040) are caused to be rotatedfor extension and retraction of the transfer assembly. For example, thestators may be located in the transfer chamber walls, within thetransfer chamber or outside the transfer chamber as described above. Inalternate embodiments the rotor and stators may be located within a baseor housing of the transport assembly 2010 itself.

In addition to driving the various transports described in the exemplaryembodiments above, in alternate embodiments, the transport drive motorsmay act as heating elements to bake out the chamber. In this alternateembodiment, the motor may have a controls mode for movement of thetransports and a heat mode for baking out the chamber.

In still other alternate embodiments, hall sensors, for example sensors299 as shown in FIG. 3A, may be located within the transport motors. Theresolution of these hall sensors may be used as position feedbackdevices for the transports.

Each exemplary embodiment shown in the Figures is capable of themovements described above with respect to FIGS. 4A through 4E and 5Athrough 5C, regardless of the different rotors used in the variousexemplary embodiments (e.g. circular rotor, spoke shaped rotor, etc.).Thus each exemplary embodiment may be capable of axially transporting asubstrate to or from any location within the various components ofsubstrate processing system 100 (FIG. 1), including transfer chamber120, processing modules 110, or load locks 115. The present exemplaryembodiments are advantageous in that no mechanical connections arerequired through the walls of transfer chamber 120.

It is important to note that any other linkage, arms, or end effectorconfiguration suitable for positioning a substrate at a specificlocation may be used in the above exemplary embodiments.

In accordance with one exemplary embodiment a substrate transportapparatus is provided. The substrate transport apparatus includes ahousing, a first stator linearly distributed substantially alongperipheral walls of the housing, a second stator linearly distributedsubstantially along the peripheral walls of the housing, and a firstsubstrate transport arm rotatable about a center of rotation locatedwithin the housing, the first substrate transport arm having an upperarm rotatable about the center of rotation and forming a first rotor, asecond rotor rotatably coupled about the center of rotation, a forearmrotatably coupled at a first end to the upper arm at a locationeccentric to the center of rotation and being drivingly coupled to thesecond rotor, and a first substrate support rotatably coupled to asecond opposite end of the forearm, wherein the first stator and firstrotor form a first motor and the second stator and second rotor form asecond motor and the first stator and second stator are configured sothat a motor output at a connection between the first and second motorsand a respective one of the first and second rotors is a resultant forcedisposed peripheral to the upper arm.

In accordance with another exemplary embodiment a substrate transportapparatus is provided. The substrate transport apparatus including aframe, a first stator linearly distributed substantially about aperiphery of the frame, a second stator linearly distributedsubstantially about the periphery of the frame, and a first substratetransport arm having, a first and second rotors rotatable about a centerof rotation located within the frame, each of the first and secondrotors having a distal end, a first and second arm links each beingrotatably coupled at a first end to a respective distal end of the firstand second rotors, and a first substrate support being rotatably coupledto a respective second end of the first and second arm links, whereinthe first and second stators are configured to apply an resultant forceto the first and second rotors where the resultant force is peripheralto the first and second arm links.

The embodiments described above are advantageous in that the controllerand stators may be located outside the transfer chamber. It is notedthat the environment outside the transfer chamber may contain acorrosive atmosphere, have an elevated temperature, or other generallyhostile environment, resulting in less potential for contamination. Themechanical aspects of transporting substrates may also be simplified toinclude fewer arms, links, and components in general, resulting in lessmass to move, better speed, precision, and control in substratetransport. All of these factors further contribute to improved substrateprocessing throughput.

It should be understood that the exemplary embodiments described hereinmay be used individually or in any suitable combination thereof. Itshould also be understood that the foregoing description is onlyillustrative of the invention. Various alternatives and modificationscan be devised by those skilled in the art without departing from theinvention. Accordingly, the present invention is intended to embrace allsuch alternatives, modifications and variances that fall within thescope of the appended claims.

1. A substrate transport apparatus comprising: a first shaftless rotarymotor including a first stator and a first rotor, the first stator beinglinearly distributed and the first rotor being coupled to a first arm; asecond shaftless rotary motor including a second stator and a secondrotor, the second stator being linearly distributed and the second rotorbeing coupled to a second arm, the second arm being connected to thefirst arm; and a first substrate support being coupled to at least oneof the first and second arms; wherein the first stator and second statorare configured so that the first and second arms and the first substratesupport are inside the stators and a motor output at a connectionbetween the first and second shaftless rotary motors and a respectiveone of the first and second arms is a resultant force disposedperipheral to the first and second arms.
 2. The substrate transportapparatus of claim 1, further comprising a housing wherein the first andsecond stators are linearly distributed substantially about a peripheryof the housing.
 3. The substrate transport apparatus of claim 2, whereinthe first and second stators are integrated into walls of the housing.4. The substrate transport apparatus of claim 1, where each of the firstand second arms comprises: a first rotatable arm link having a center ofrotation and a distal end; and a second arm link rotatably coupled tothe distal end of the first arm link; wherein, the first arm links ofeach of the first and second arms comprises a respective one of thefirst and second rotors and each of the second arm links of the firstand second arms is rotatably coupled to the first substrate support. 5.The substrate transport apparatus of claim 4, wherein the firstrotatable arm link of each of the first and second arms comprises arespective one of the first and second rotors in the form of a ring ordisk where the distal end is a periphery of the ring or disk.
 6. Thesubstrate transport apparatus of claim 5, wherein the ring or disk ofeach of the first and second arms forms a self bearing motor with arespective one of the first and second stators.
 7. The substratetransport apparatus of claim 4, wherein the first rotatable arm link ofeach of the first and second arms comprises a respective one of thefirst and second rotors in the form of an elongated link member wherethe distal end is opposite the center of rotation.
 8. The substratetransport apparatus of claim 1, wherein: the first arm comprises thefirst rotor, the first arm having a proximate end located at a center ofrotation of the first arm; the second arm comprises the second rotor,the second arm being rotatably coupled at a proximate end to a distalend of the first arm at an elbow joint; and the first substrate supportbeing rotatably coupled to a distal end of the second arm; wherein theresultant force is applied to the first and second arms by a respectiveone of the first and second stators substantially at the elbow joint. 9.The substrate transport apparatus of claim 8, wherein the firstsubstrate support is configured to remain substantially longitudinallyaligned with an axis of extension and retraction of the substratetransport apparatus.
 10. The substrate transport apparatus of claim 1,further comprising a frame wherein: the first arm comprises the firstrotor, the first arm having a proximate end rotatably coupled on an armsupport within the frame and a distal end; the second rotor having aproximate end rotatably coupled to the arm support and a distal end; thesecond arm having a proximate end rotatably coupled to the distal end ofthe first arm at an elbow joint, the second arm being drivingly coupledto the second rotor; and the first substrate support being rotatablycoupled to a distal end of the second arm; wherein the resultant forceis applied by a respective one of the first and second stators to thefirst arm substantially at the elbow joint and substantially at thedistal end of the second rotor.
 11. The substrate transport apparatus ofclaim 10, wherein the first substrate support is configured to remainsubstantially longitudinally aligned with an axis ofextension/retraction of the substrate transport apparatus.
 12. Thesubstrate transport apparatus of claim 1, further comprising: a thirdshaftless rotary motor including a third stator and a third rotor, thethird stator being linearly distributed and the third rotor beingcoupled to a third arm; a fourth shaftless rotary motor including afourth stator and a fourth rotor, the fourth stator being linearlydistributed and the fourth rotor being coupled to a fourth arm, thefourth arm being connected to the third arm; and a second substratesupport being coupled to at least one of the third and fourth arms;wherein the third stator and fourth stator are configured so that thethird and fourth arms and the second substrate support are inside thestators and a motor output at a connection between the third and fourthshaftless rotary motors and a respective one of the third and fourtharms is a resultant force disposed peripheral to the first and secondarms.
 13. The substrate transport apparatus of claim 12, furthercomprising a frame wherein the first, second, third and fourth statorsare linearly distributed substantially about a periphery of the frame.14. The substrate transport apparatus of claim 12, where the each of thefirst, second, third and fourth arms comprises: a first rotatable armlink having a center of rotation and a distal end; and a second arm linkrotatably coupled to the distal end of the first arm link; wherein, thefirst arm links of each of the first second, third and fourth armscomprises a respective one of the first second, third and fourth rotors,each of the second arm links of the first and second arms is rotatablycoupled to the first substrate support, and each of the second arm linksof the third and fourth arms is rotatably coupled to the secondsubstrate support.
 15. The substrate transport apparatus of claim 14,wherein the first rotatable arm link of each of the first second, thirdand fourth arms comprises a respective one of the first second, thirdand fourth rotors in the form of a ring or disk where the distal end isa periphery of the ring or disk.
 16. The substrate transport apparatusof claim 14, wherein the ring or disk of each of the first second, thirdand fourth arms forms a self bearing motor with a respective one of thefirst second, third and fourth stators.
 17. The substrate transportapparatus of claim 12, wherein the first rotatable arm link of each ofthe first second, third and fourth arms comprises a respective one ofthe first second, third and fourth rotors in the form of an elongatedlink member where the distal end is opposite the center of rotation. 18.The substrate transport apparatus of claim 12, wherein: the first armcomprises the first rotor, the first arm having a proximate end locatedat a center of rotation of the first arm and a distal end; the secondarm comprises the second rotor, the second arm being rotatably coupledat a proximate end to the distal end of the first arm at a first elbowjoint; the first substrate support being rotatably coupled to a distalend of the second arm; the third arm comprises the third rotor, thethird arm having a proximate end located at a center of rotation of thethird arm; the fourth arm comprises the fourth rotor, the fourth armbeing rotatably coupled at a proximate end to a distal end of the thirdarm at a second elbow joint; and the second substrate support beingrotatably coupled to a distal end of the fourth arm; wherein theresultant force is applied to the first, second, third and fourth armsby a respective one of the first second, third and fourth stators at arespective one of the first and second elbow joint.
 19. The substratetransport apparatus of claim 12, further comprising a frame wherein: thefirst arm comprises the first rotor, the first arm having a proximateend rotatably coupled on an arm support within the frame; the secondrotor having a proximate end rotatably coupled to the arm support; thesecond arm having a proximate end rotatably coupled to a distal end ofthe first arm at a first elbow joint, the second arm being drivinglycoupled to the second rotor; the first substrate support being rotatablycoupled to a distal end of the second arm; the third arm comprises thethird rotor, the third arm having a proximate end rotatably coupled tothe arm support; the fourth rotor having a proximate end rotatablycoupled to the arm support; the fourth arm having a proximate endrotatably coupled to a distal end of the third arm at a second elbowjoint, the fourth arm being drivingly coupled to the fourth rotor; andthe second substrate support being rotatably coupled to a distal end ofthe fourth arm; wherein the resultant force is applied to the first andsecond arm substantially at a respective one of the first and secondelbow joint and substantially to the distal end of the second and fourthrotor.
 20. The substrate transport apparatus of claim 12, wherein thefirst substrate support and the second substrate support extend andretract in substantially opposite directions.
 21. The substratetransport apparatus of claim 12, wherein the first substrate support andthe second substrate support extend and retract in substantially thesame direction.
 22. The substrate transport apparatus of claim 12, whereeach of the first, second third and fourth arms comprises: a firstrotatable arm link having a center of rotation and a distal end; and asecond arm link rotatably coupled to the distal end of the first armlink; wherein, the first arm links of each of the first, second thirdand fourth arms comprises a respective one of the first, second thirdand fourth rotors, each of the second arm links of the first and secondarms is rotatably coupled to the first substrate support and each of thesecond arm links of the third and fourth arms is rotatably coupled tothe second substrate support.
 23. The substrate transport apparatus ofclaim 1, wherein the first and second stators are configured tovertically move the first and second arms.
 24. A substrate transportapparatus comprising: a first shaftless rotary motor including a firststator and a first rotor, the first stator being linearly distributedand the first rotor being coupled to a first arm; a second shaftlessrotary motor including a second stator and a second rotor, the secondstator being linearly distributed and the second rotor being coupled toa second arm, the second arm being connected to the first arm; and afirst substrate support being coupled to at least one of the first andsecond arms; wherein the first stator and second stator are arranged sothat the first stator and second stator substantially surround the firstand second arms.
 25. A substrate transport apparatus comprising: ahousing; a first stator linearly distributed substantially alongperipheral walls of the housing; a second stator linearly distributedsubstantially along the peripheral walls of the housing; a firstsubstrate transport arm having a center of rotation located within thehousing, the first substrate transport arm having an upper arm rotatableabout the center of rotation and forming a first rotor, a forearmrotatably coupled at a first end to the upper arm at a locationeccentric to the center of rotation, the forearm forming a second rotor,and a first substrate support rotatably coupled to a second opposite endof the forearm; and wherein the first stator and first rotor form afirst motor and the second stator and second rotor form a second motor,and the upper arm, forearm and first substrate support are inside thefirst and second stators and a motor output of the first and secondmotors at a connection point between the first and second motors and arespective one of the upper arm and forearm is a resultant forcedisposed peripheral to the upper arm and forearm.
 26. The substratetransport apparatus of claim 25, wherein the forearm includes a firstforearm member rotatable about the eccentric location and a secondforearm member rotatable about the center of rotation, the first forearmmember being drivingly coupled to the second forearm member where theresultant force is applied to the second forearm member for effectingrotation of the first forearm member.
 27. The substrate transportapparatus of claim 25, further comprising: a third stator linearlydistributed substantially along peripheral walls of the housing; afourth stator linearly distributed substantially along the peripheralwalls of the housing; a second substrate transport arm having a centerof rotation located within the housing, the second substrate transportarm having an upper arm rotatable about the center of rotation andforming a third rotor, a forearm rotatably coupled at a first end to theupper arm at a location eccentric to the center of rotation, the forearmforming a fourth rotor, and a second substrate support rotatably coupledto a second opposite end of the forearm; wherein the third stator andthird rotor form a third motor and the fourth stator and fourth rotorform a fourth motor, and the upper arm, forearm and second substratesupport of the second substrate transport arm are inside the third andfourth stators and a motor output of the third and fourth motors at aconnection point between the third and fourth motors and a respectiveone of the upper arm and forearm is a resultant force disposedperipheral to the respective one of the upper arm and forearm.
 28. Asubstrate transport apparatus comprising: a housing; a first statorlinearly distributed substantially along peripheral walls of thehousing; a second stator linearly distributed substantially along theperipheral walls of the housing; and a first substrate transport armrotatable about a center of rotation located within the housing, thefirst substrate transport arm having an upper arm rotatable about thecenter of rotation and forming a first rotor, a second rotor rotatablycoupled about the center of rotation, a forearm rotatably coupled at afirst end to the upper arm at a location eccentric to the center ofrotation and being drivingly coupled to the second rotor, and a firstsubstrate support rotatably coupled to a second opposite end of theforearm; wherein the first stator and first rotor form a first motor andthe second stator and second rotor form a second motor and the firststator and second stator are configured so that a motor output at aconnection between the first and second motors and a respective one ofthe first and second rotors is a resultant force disposed peripheral tothe upper arm.
 29. The substrate transport apparatus of claim 28,further comprising: a third stator linearly distributed substantiallyalong peripheral walls of the housing; a fourth stator linearlydistributed substantially along the peripheral walls of the housing; asecond substrate transport arm rotatable about the center of rotation,the second substrate transport arm having an upper arm rotatable aboutthe center of rotation and forming a third rotor, a fourth rotorrotatably coupled about the center of rotation, a forearm rotatablycoupled at a first end to the upper arm at a location eccentric to thecenter of rotation and being drivingly coupled to the fourth rotor, anda second substrate support rotatably coupled to a second opposite end ofthe forearm; wherein the third stator and third rotor form a third motorand the fourth stator and fourth rotor form a fourth motor and the thirdstator and fourth stator are configured so that a motor output at aconnection between the third and fourth motors and a respective one ofthe third and fourth rotors is a resultant force disposed peripheral tothe upper arm of the second substrate transport arm.
 30. The substratetransport apparatus of claim 28, wherein the upper arm comprises asubstantial ring shape and forms a self bearing motor with the firststator.
 31. The substrate transport apparatus of claim 28, wherein theupper arm comprises an elongated link member rotatably supported by ashaft located at the center of rotation.
 32. A substrate transportapparatus comprising: a frame; a first stator linearly distributedsubstantially about a periphery of the frame; a second stator linearlydistributed substantially about the periphery of the frame; and a firstsubstrate transport arm having, a first and second rotors rotatableabout a center of rotation located within the frame, each of the firstand second rotors having a distal end, a first and second arm links eachbeing rotatably coupled at a first end to a respective distal end of thefirst and second rotors, and a first substrate support being rotatablycoupled to a respective second end of the first and second arm links;wherein the first and second stators are configured to apply anresultant force to the first and second rotors where the resultant forceis peripheral to the first and second arm links.
 33. The substratetransport apparatus of claim 32, further comprising: a third statorlinearly distributed substantially about a periphery of the frame; afourth stator linearly distributed substantially about the periphery ofthe frame; a second substrate transport arm having, a third and fourthrotors rotatable about the center of rotation, each of the third andfourth rotors having a distal end, a third and fourth arm links eachbeing rotatably coupled at a first end to a respective distal end of thethird and fourth rotors, and a second substrate support being rotatablycoupled to a respective second end of the third and fourth arm links;wherein the third and fourth stators are configured to apply anresultant force to the third and fourth rotors where the resultant forceis peripheral to the third and fourth arm links.